•Long Life Non-mechanical-wear, High Working Reliability. •High Capability Degree of vacuum pressure is 10-6 Pa; Leakage rates are in the region of 10-12 Pa.m3/sec. •High applicability
6×3.5×32
－
Nut U
15
22
34
54
28
42
46
58
R
3
5
6
12
8
10
Washer T
16
38
52
S
1
2
Torque capacity[ kg· cm]
9.5
15.2
76
570
123.5
Degree of vacuumpressure [Pa]
10-6
Leakage rate(He)[Pa.m3/sec]
<10-12
Temperature range(℃)
0～80(Adding water cooling structure if it is beyond this temperature range.)
