•Long Life Non-mechanical-wear, High Working Reliability. •High Capability Degree of vacuum pressure is 10-6 Pa; Leakage rates are in the region of 10-12 Pa.m3/sec. •High applicability
Model Number
VGSML004NN
VGSML005NN
VGSML006NN
Torque capacity[ kg· cm]
5.8
6.4
Degree of vacuum pressure[Pa]
10-6
Leakage rate(He)[Pa.m3/sec]
<10-12
耐压差[kg/cm2]
2.5
Temperature range(℃)
0~80(Adding water cooling structure if it is beyond this temperature range.)
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