•Long Life Non-mechanical-wear, High Working Reliability. •High Capability Degree of vacuum pressure is 10-6 Pa; Leakage rates are in the region of 10-12 Pa.m3/sec. •High applicability
Model Number
VGSFL020NH
VGSFL025NH
VGSFL030NH
VGSFL040NH
VGSFL050NH
A
20
25
30
40
50
B
255
288
321
357
406
C
135
138
141
157
166
D
85
95
105
125
140
E
6WX3.5DpX50Lg
8WX4DpX63Lg
10WX5DpX80Lg
12WX5DpX90Lg
14WX5.5DpX110Lg
F
60
75
90
100
120
J
145
158
185
208
K
18
22
24
N
PD120/6-φ12
PD135/6-φ12
PD160/8-φ12
PD185/8-φ12
Torque capacity[kg.cm]
585
1013
1621
3242
5801
Degree of vacuum pressure [Pa]
10-6
Leakage rate(He)[Pa.m3/sec]
<10-12
Temperature range(℃)
0~80
(Adding water cooling structure if it is beyond this temperature range.)