VGHFL012NN、 VGHFL012WN、VGHFL025NN、VGHFL025WN、VGHFL040WN、VGHFL040WH、VGHFL050NN、VGHFL050WN
•Long Life Non-mechanical-wear, High Working Reliability. •High Capability Degree of vacuum pressure is 10-6 Pa; Leakage rates are in the region of 10-12 Pa.m3/sec. •High applicability
Model Number
VGHFL012NN/ VGHFL012WN
VGHFL025NN/
VGHFL025WN
VGHFL040WN
VGHFL040WH
VGHFL050NN/
VGHFL050WN
A
0.502
1.002
1.502
1.501
2.002
B
3.215
3.34
3.714
6.9
3.966
C
2.75
3.00
5.00
3.25
D
3.75
4.88
4.18
E
1.25
2.00
3.50
F
0.38
0.50
0.62
G
0.500
1.000
2.000
H
6.00
7.00
8.00
J
L
0.750，4x
on 4.750 bc
on 5.500 bc
on 7.000 bc
on 5.500bc
Degree of vacuum pressure（Pa）
10-6
Leakage rate(He) [Pa·m3/sec]
<10-12
Temperature range[℃]
0～80
(Adding water cooling structure if is beyond this temperature range)
Use of gas
Non-reactive gases
