•Long Life Non-mechanical-wear, High Working Reliability. •High Capability Degree of vacuum pressure is 10-6 Pa; Leakage rates are in the region of 10-12 Pa.m3/sec. •High applicability
Model Number
VGSSL005NN
VGSSL006NN
VGSTL012NN/ VGSTL012WN
VGSTL019NN/ VGSTL019WN
A
0.1875
0.250
0.500
0.75
B
0.030dX0.37L（flat）
0.030dX0.40L（flat）
0.126wX0.77dX1L
0.188wX0.114dX1.0L
C
0.50
2.49
D
2.562
3.437
8.812
E
1.58
1.937
5.072
F
0.63
2.87
G
1.3
1.562
3.562
H
5/16-24 UNF-2A
7/16-20 UNF-2A
1”-14 UNS-2A
J
0.28
0.375
1.33
Torque capacity[Ib-in]
10
16
180
670
Degree of vacuum pressure[Pa]
10-6
Leakage rate(He) [Pa·m3/sec]
<10-12
Temperature range[℃]
0～80
(Adding water cooling structure if is beyond this temperature range)
Use of gas
Non-reactive gases
